CVD: Chemical Vapour Deposition Technique for synthesis of diamond layers

In this lab our main research field is to study the synthesis of diamond phase thin layers deposited by MPECVD (Microwave Plasma Enhanced Chemical Vapour Deposition): investigation of the formation of micro-, nano- and ultrananocrystalline phase of diamond layers; MEMS-, sensor- and 3D coating applications of MPECVD diamond, SAD (Selective Area Deposition) of diamond, coating technology for passivation; investigation the formation, properties and applications of active color centers in diamond for quantum optics and photonic applications;

In 2020 in co-operation with the Wigner Research Centre for Physics we installed a new, compact, modular built MPECVD platform in the Institute for Solid State Physics and Optics, Department of the Applied and Nonlinear Optics, and based on this agreement the operation of the equipment and the research activity will be proceeded in Wigner-RC in co-operation with the Department of Atomic Physics of FNS, BME.